김성균 교수

학력

• 1981. 02 서울대 (공학사-금속공학)
• 1983. 02 서울대 (공학석사- 금속공학)
• 1987. 08 서울대 (공학박사- 금속공학)

경력

• 1988. 03 ~ 현재 국립군산대학교 신소재공학과 교수

연구분야

• 결정성장 실험, 이론 및 시뮬레이션
• 계면 이동의 열역학과 동역학
• 철강 상변태 이론 및 시뮬레이션

주요 연구발표

• S.G. Kim and Y.B. Park, “Fluctuation effect in grain growth”, Modelling and Simulation in Materials Science and Engineering, 24 (2016) 065013.
• S.G. Kim, J.S. Lee and B.J. Lee. “Thermodynamic properties of phase-field models for grain boundary segregation”, Acta Materialia, 112 (2016) 150.
• K.M. Kim, H.K. Kim, J.Y. Park, J.S. Lee, S.G. Kim, N.J. Kim and B.J. Lee, “{100} texture evolution in bcc Fe sheets – Computational design and experiments”, Acta Materialia, 106 (2016) 106.
• J.S. Lee, B.J. Lee, Y.M. Koo and S.G. Kim, “3D simulation of grain growth in polycrystalline sheets and rods”, Scripta Materialia, 110 (2016) 113
• 이병주, 김성균, “원자단위 시뮬레이션과 phase field 모델”, (2016), 홍릉과학출판사
• Y.B. Park, I.G. Kim, S.G. Kim, W.T. Kim, T.C. Kim, M.S. Oh and J.S. Kim, “Orientation Dependence of Cracking in Hot-Dip Zn-Al-Mg Alloy Coatings on a Sheet Steel“, Metallurgical and Materials Transaction A, 48 (2017) 1013
• J.S. Lee, D.W. Duh, Y.M. Koo and S.G. Kim, “Numerical modelling of moving interfaces under local equilibrium conditions”, Calphad, 59 (2017) 164
• S.G. Kim, J.Y. Huh, G.J. Chung, H.S. Hwang and S.H. Kim” Dendritic Morphologies of Hot-Dip Galvanized Zn-0.2 Wt Pct Al Coatings on Steel Sheets“, Metallurgical and Materials Transaction A, 50 (2019) 3186

주정훈 교수

학력

• 1985 서울대 (공학사-금속공학)
• 1987 서울대 (공학석사-플라즈마)
• 1990 서울대 (공학박사-플라즈마)

경력

• 1990 ~ 1991 KIST, 재료설계연구실 Post-Doc,
• 1991 ~ 1992 금성일렉트론(현, SK Hynix) 반도체연구소, 선임연구원
• 1992 ~ 현재 국립군산대학교 신소재공학과 교수
• 2005 ~ 2006 IBM Watson Research Center, Visiting Professor
• 2012 ~ 2013 서울대학교 재료공학부, 객원교수

연구분야

• 반도체, 디스플레이용 플라즈마 증착 및 식각 장비 및 공정 개발
• 플라즈마 시뮬레이션
• 프리미엄 자동차용 부품 평가 및 플라즈마 기술 응용

주요 연구발표

• Ho Jun Kim, Wonkyun Yang and Junghoon Joo, “Effect of electrode spacing on the density distributions of electrons, ions, and metastable and radical molecules in SiH4/NH3/N2/He capacitively coupled plasmas”, Journal of Applied Physics 118, 04330-4-1 (2015)
• Seong Yun Kim, So-Young Kim, Jisung Choi , Sungho Lee, Seong Mu Jo, Junghoon Joo, Hun-Su Lee, “Two step microwave plasma carbonization including low plasma power pre-carbonization for polyacrylonitrile based carbon fiber”, Polymer 69, 123 (2015)
• Sun-Ho Choi, Bo-Yun Jang, Jin-Seok Lee, Young-Soo Ahn, Woo-Young Yoon, Jung-Hoon Joo, “Effects of electron beam patterns on melting and refining of silicon for photovoltaic applications”, Renewable Energy 54, 40 (2013)
• Wonkyun Yang, Junghoon Joo, “Resistivity improvement of Al-doped ZnO film by bipolar pulsed dc magnetron sputtering with high Ar flow rate”, Current Applied Physics 12, S99 (2012)

선호정 교수

학력

• 1988 고려대 (공학사-재료공학)
• 1990 고려대 (공학석사-전자재료)
• 2002 고려대 (공학박사-반도체공정)

경력

• 1990.3 ~ 2005.2 하이닉스반도체 (현, SK하이닉스) 연구소 책임연구원
• 2005.3 ~ 현재 국립군산대학교 신소재공학과 교수

연구분야

• 반도체공정 (ALD, CVD, Multilevel Metallization, High-k Capacitor Process)
• 반도체장비 및 소재

주요 연구발표

• “Oxidation characteristics of TiN film as a barrier metal for bottom-electrode Ru film fabricated from tris-(2,4-octanedionato)ruthenium”, Jpn. J. Appl. Phys, 42, 582, 2003.
• “Properties of Ru thin films fabricated on TiN by metal-organic chemical vapor deposition”, Jpn. J. Appl. Phys. 43, 1566, 2004.
• “Effects of high-temperature metal-organic chemical vapor deposition of Pb(Zr,Ti)O3 thin films on structural stabilities of hybrid Pt/IrO2/Ir stack and single-layer Ir bottom electrodes”, Jpn. J. Appl. Phys. 43, 2651, 2004.
• “Preparation of platinum thin films by metalorganic chemical vapor deposition using oxygen-assisted decomposition of (ethylcyclopentadienyl)trimethylplatinum”, Jpn. J. Appl. Phys. 43, L624, 2004.
• “Fabrication of highly dense Ru thin films by high-temperature metal-organic chemical vapor deposition with NH3 gas as Ru oxidation suppressing agent”, Jpn. J. Appl. Phys. 43, 5482, 2004.
• "(Bi,La)4Ti3O12 (BLT) thin films grown from nanocrystalline perovskite nuclei for ferroelectric memory devices”, Appl. Phys. Lett. 85, 4118, 2004.
• "Physical and electrical characteristics of physical vapor-deposited tungsten for bit line process", Jpn. J. Appl. Phys. 43, 8007 , 2004.
• “Epitaxial growth of CoSi2 in a decanano contact opening on a (100) silicon substrate” Appl. Phys. Lett. 86, 221919, 2005.
• “Characterizations of pulsed chemical vapor deposited-tungsten thin films for ultrahigh aspect ratio W-plug process”, J. Electrochem. Soc. 152, 2005.
• "Effects of B2H6 pretreatment on ALD of W film using a sequential supply of WF6 and SiH4", Electrochem. and Solid-State Lett. 8, C155, 2005.
• “Investigation on the electrical properties of the Ba2Ti9O20 thin films for metal-insulator-metal capacitor application”, J. Electrochem. Soc.154, H412, 2007.
• “Preparation of semiconductive La0.6Sr0.4MnO3 thin films by metal-organic decomposition for electrode applications”, J. Kor. Phys. Soc. 57, 994, 2010.
• ”Preparation of NaxWO3 (x= 1 and 0.75) thin films and their electrical conduction properties”, J. KIEEME 25, 602, 2012.
• ”Phase formation behavior and electrical conduction properties of Na0.6WO3 thin films prepared by rf sputtering followed by annealing”, J. KIEEME 27, 510, 2014.
• “Fabrication of Li2MnSiO4 cathode thin film for Li-ion secondary thin film batteries and their electrochemical properties”, J. KIEEME 30, 447, 2017.

수행 연구과제

• “Epi-Si용 CVD system 개발”, 기업과제, 2005. 11. 01. ~ 2006. 10. 31.
• “내식성 플라즈마 스프레이 코팅 기술 개발”, 기업과제, 2007. 05. 01.~ 2009. 04. 30.
• “PECVD 법을 사용한 질화규소(SiNx) 반사방지막 증착장비 개발 및 공정 평가”, 한국부품소재산업진흥원, 2007. 07. 01. ～ 2007. 09. 30.
• “RF 수동회로를 능동회로 상에 집적화하기 위한 고기능성 고주파 박막 캐패시터 개발”, 한국학술진흥재단, 2007. 08. 01. ~ 2008. 07.31.
• “고 전도성 산화물 박막 소재 개발”, 산업자원부, 2008.07.01. ~ 2012.06.30.
• “플라즈마를 이용한 리튬 박막 전지 개발”, 국가핵융합연구소, 2013.01.01. ~ 2015.12.31.
• “반도체 장비용 세라믹 소재 개발”, 기업 과제, 2016.03.01. ~ 2018.02.28.